Gg. Devyatykh et Pg. Sennikov, SPECTROSCOPIC DETERMINATION AND STUDY OF THE MOLECULAR-STATE OF WATERIN HIGH-PURITY VOLATILE INORGANIC SUBSTANCES, Uspehi himii, 64(9), 1995, pp. 872-887
The state of art of the methods of determination and study of molecula
r state of water impurity in high-purity volatile substances (permanen
t gases, chlorides, hydrides) used in high technology processes is dis
cussed. Primary attention is given to spectroscopic methods in infrare
d and microwave regions.