E. Krishnakumar et Sk. Srivastava, IONIZATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT, Contributions to Plasma Physics, 35(4-5), 1995, pp. 395-404
Partial ionization cross sections for silane and disilane by electron
impact have been measured for electron energies in the range of thresh
old to 1000 eV using a crossed beam geometry and employing a pulsed el
ectron beam and a pulsed ion extraction technique. The cross sections
were normalized by using the relative flow technique. For ease of use
in various plasma modeling we have fitted the cross sections to an emp
irical formula.