IONIZATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT

Citation
E. Krishnakumar et Sk. Srivastava, IONIZATION CROSS-SECTIONS OF SILANE AND DISILANE BY ELECTRON-IMPACT, Contributions to Plasma Physics, 35(4-5), 1995, pp. 395-404
Citations number
11
Categorie Soggetti
Phsycs, Fluid & Plasmas
ISSN journal
08631042
Volume
35
Issue
4-5
Year of publication
1995
Pages
395 - 404
Database
ISI
SICI code
0863-1042(1995)35:4-5<395:ICOSAD>2.0.ZU;2-O
Abstract
Partial ionization cross sections for silane and disilane by electron impact have been measured for electron energies in the range of thresh old to 1000 eV using a crossed beam geometry and employing a pulsed el ectron beam and a pulsed ion extraction technique. The cross sections were normalized by using the relative flow technique. For ease of use in various plasma modeling we have fitted the cross sections to an emp irical formula.