LASER-DRIVEN MOVEMENT OF 3-DIMENSIONAL MICROSTRUCTURES GENERATED BY LASER RAPID PROTOTYPING

Three-dimensional microstructures consisting of aluminum oxide and alu minum were fabricated by laser-induced direct-write deposition from th e gas phase. Trimethylamine alane and oxygen were used as precursors. Thermal expansion forces resulting from suitable laser irradiation wer e used to drive the movement of microstructure parts. Applications inc lude micromechanical actuators, such as microtweezers and micromotors. The one-step nature of the laser direct-write process allows rapid pr ototyping of such devices.