1 PM SPECTRALLY NARROWED ARF EXCIMER-LASER INJECTION-LOCKED BY 4TH HARMONIC SEED SOURCE OF 773.6 NM TI-SAPPHIRE LASER

Authors
KASAMATSU T TSUNEKANE M SEKITA H MORISHIGE Y KISHIDA S
Citation
T. Kasamatsu et al., 1 PM SPECTRALLY NARROWED ARF EXCIMER-LASER INJECTION-LOCKED BY 4TH HARMONIC SEED SOURCE OF 773.6 NM TI-SAPPHIRE LASER, Applied physics letters, 67(23), 1995, pp. 3396-3398
Citations number
11
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
67
Issue
23
Year of publication
1995
Pages
3396 - 3398
Database
ISI
SICI code
0003-6951(1995)67:23<3396:1PSNAE>2.0.ZU;2-N
Abstract
We have achieved spectrum narrowing to 1 pm in a high-power ArF excime r laser injection locked by an all solid-state fourth harmonic (193.4 nm) seed source of 773.6 nm Ti:sapphire laser radiation. Superior lase r properties such as sufficient output energy (90 mJ/pulse, 50 pps), l ocking efficiency exceeding 90%, wavelength drift less than 0.4 pm, an d spectrum bandwidth fluctuation less than 0.2 pm were obtained, which meet the requirements for 1 Gbit dynamic random access memory microli thography. (C) 1995 American Institute of Physics.