X-RAY SPECTRAL MICROANALYSIS OF POWDER MATERIALS (REVIEW)

Specific errors arising in the x-ray spectral microanalysis of powder materials are considered. Additional errors are associated with the oc currence of a local charge in the x-ray excitation zone and with a cha nge in the incidence angle of the electrons, resulting in a change in the number of back-scattered electrons and their angular and energy di stributions. These errors can be accounted for by techniques using eit her the dependence of the analyte signal on the initial electron energ y or the spectral intensity of the bremsstrahlung.