NECESSITY AND UTILITY OF A SCANNING ELECTRON-MICROSCOPE WITH 4,096 LINES

The present report illustrates the necessity and utility of an ultrahi gh scanning density (4,096 lines/frame) in scanning electron microscop y (SEM), In principle, image quality of digital SEM images is consider ably influenced by scanning and digitization conditions, Several probl ems with conventional digital SEM images, e,g,, resolution, aliasing e rror, signal-to-noise ratio (SNR), are resolved in the proposed system , Handling of a useful image with 4,096 lines (12.6 MB/image) is not h ard at all for a modern personal computer, and moreover an SEM microsc opist can use some favorite area clippings with sufficient resolution from the recorded huge SEM image like transmission electron microscopy (TEM), In the near future, many SEMs will adopt methods of this kind.