IDENTIFICATION OF SE2 AND SE-AS PAIRS IN SILICON BY ELEMENTAL TRANSMUTATION

Selenium related levels in silicon are studied by deep level transient spectroscopy (DLTS) on the radioactive isotope Se-75. During its elem ental transmutation to As-75, DLTS measurements are performed repeated ly. The two levels of the isolated Se atom are identified by their con centration decrease according to the radioactive decay law. The concen tration of a level at E(c) - 0.19 eV decreases with twice the decay ra te. This directly proves the involvement of two Se-75 atoms. A Se-As p air, which forms the intermediate state in the Se-2 --> (Se-As) --> As -2 transmutation, is discovered (E(2) - 0.15 eV).