SIMULTANEOUS ANALYSIS OF LOW-Z IMPURITIES IN THE NEAR-SURFACE REGION OF SOLID MATERIALS BY HEAVY-ION ELASTIC RECOIL DETECTION (HIERD)

A HIERD setup (HI-ERD = heavy ion elastic recoil detection) is introdu ced including a semiconductor Delta E-E telescope for the detection of hydrogen and helium isotopes and a Bragg Ionization Chamber (BIC) for the identification of heavier recoils. An optimum forward scattering geometry with respect to maximum analyzable depth and sensitivity is d etermined experimentally as well as by calculations for the analysis o f oxygen and hydrogen using 35 MeV Cl-35 incident ions. As a relevant application of the method, the Na content of borosilicate glass is inv estigated in samples subject to anodic bonding procedures.