S. Grigull et al., SIMULTANEOUS ANALYSIS OF LOW-Z IMPURITIES IN THE NEAR-SURFACE REGION OF SOLID MATERIALS BY HEAVY-ION ELASTIC RECOIL DETECTION (HIERD), Fresenius' journal of analytical chemistry, 353(5-8), 1995, pp. 578-581
A HIERD setup (HI-ERD = heavy ion elastic recoil detection) is introdu
ced including a semiconductor Delta E-E telescope for the detection of
hydrogen and helium isotopes and a Bragg Ionization Chamber (BIC) for
the identification of heavier recoils. An optimum forward scattering
geometry with respect to maximum analyzable depth and sensitivity is d
etermined experimentally as well as by calculations for the analysis o
f oxygen and hydrogen using 35 MeV Cl-35 incident ions. As a relevant
application of the method, the Na content of borosilicate glass is inv
estigated in samples subject to anodic bonding procedures.