INVESTIGATION OF SURFACE-TOPOGRAPHY, MORPHOLOGY AND STRUCTURE OF AMORPHOUS-CARBON FILMS BY AFM AND TEM

Morphology and structure of amorphous carbon films deposited with a pu lsed are source (LASER-ARC) have been studied using microscopical meth ods (SEM, TEM and AFM), electron diffraction and spectro-scopical inve stigation (EELS). The parameters of the are source and the deposition conditions (substrate temperature) influence morphology and structure of deposited amorphous carbon films. Especially the incorporation and growth of particles, embedded in the film have been investigated. By p article analysis using an optical microscope a majority of particles t hat is smaller than 500 nm has been determined. The morphology has bee n also demonstrated similar by AFM and TEM images. Their number and si ze of particles is strongly influenced by the deposition temperature. The structure of amorphous film is characterized by the EELS-spectra, but the particle structure was not detectable.