R. Joerger et al., ANALYSIS OF THE MORPHOLOGY AND THE OPTICAL-PROPERTIES OF SPUTTERED MOLYBDENUM PARTICLES, Fresenius' journal of analytical chemistry, 353(5-8), 1995, pp. 713-717
The optical constants of thin sputtered molybdenum layers, embedded in
a ceramic-metal composite produced by a batch sputtering deposition s
ystem were analyzed. This was accomplished by assuming a multilayer sy
stem for a tin oxide-molybdenum cermet and calculating the optical con
stants from angular and polarization dependent reflection and transmis
sion spectra. These optical constants differ strongly from those for s
puttered bulk material obtained ellipsometrically. A good agreement be
tween measured effective refractive indices for cermets and effective
medium calculation was found, if these optical constants for molybdenu
m were used in the effective medium calculations. Differences to the o
ptical constants of the cermet determined ellipsometrically were expla
ined by the birefringence of the cermet. The size and the shape of the
embedded particles were investigated with an atomic force microscope.