ANALYSIS OF THE MORPHOLOGY AND THE OPTICAL-PROPERTIES OF SPUTTERED MOLYBDENUM PARTICLES

The optical constants of thin sputtered molybdenum layers, embedded in a ceramic-metal composite produced by a batch sputtering deposition s ystem were analyzed. This was accomplished by assuming a multilayer sy stem for a tin oxide-molybdenum cermet and calculating the optical con stants from angular and polarization dependent reflection and transmis sion spectra. These optical constants differ strongly from those for s puttered bulk material obtained ellipsometrically. A good agreement be tween measured effective refractive indices for cermets and effective medium calculation was found, if these optical constants for molybdenu m were used in the effective medium calculations. Differences to the o ptical constants of the cermet determined ellipsometrically were expla ined by the birefringence of the cermet. The size and the shape of the embedded particles were investigated with an atomic force microscope.