COUPLED MODEL FOR NEUTRAL TRANSPORT AND CHARGED SPECIES DYNAMICS IN HIGH-DENSITY PLASMA REACTORS

We present a model to study high density plasma reactors used in semic onductor processing. The model is based on a continuum approach with c onservation equations for mass, momentum, and energy in a multicompone nt, multitemperature system. The governing equations are radially aver aged to obtain a one-dimensional model for the transport of neutrals a nd charged species in the flow direction. Processes at the radial wall are properly included as source/sink terms by weighting with surface area to volume ratio. The model is applied to an electron cyclotron re sonance reactor and simulations of an argon discharge are presented fo r pressures in the range of 1-10 mTorr and flow rates of 5-80 seem. Th e predictions of plasma density, electron and gas temperatures, pressu re, and neutral density are consistent with experimental observations and compare favorably with data. (C) 1995 American Institute of Physic s.