The evolution of the morphology during heating of an oxygen-covered Ga
As(100) surface is studied with thermal He-scattering. The accompanyin
g desorption of oxygen is monitored with Auger electron spectroscopy a
nd thermal desorption spectroscopy. The c(8 X 2) and the disordered (6
x 6) reconstruction of the GaAs(100) surface were investigated: oxyge
n from a seeded nozzle beam (E(O-2)= 260 meV) is adsorbed on the surfa
ce at room temperature. Upon heating the oxygen-covered surface both r
econstructions are found to disorder above 150 degrees C. Above 380 de
grees C desorption of molecular oxygen is observed, indicating that th
e oxygen was molecularly adsorbed. As the desorption proceeds a comple
x reordering process takes place in which areas with a 3 X n and/or n
X 4 periodicity are formed. After the desorption is completed some fur
ther reordering of the surface is observed before the transition to th
e stable high temperature c(8 X 2) reconstruction takes place. The obs
ervations can be explained by assuming that the oxygen molecules repla
ce atoms in the outermost layer(s). The replaced atoms mimick an incre
ase of the As-coverage.