MIRROR X-RAY MICROSCOPE FOR THE INVESTIGA TION OF OBJECTS ILLUMINATEDBY LASER-PLASMA RADIATION

Multilayer windows were used in an x-ray optical system which formed m agnified images of microscopic objects with a resolution of similar to 0.2 mu m at the wavelength 20 nm. The system consisted of a laser-pla sma source, an x-ray condenser, a Schwarzschild objective with a magni fication 20, a set of filters, and a detector. The quality of the x-ra y optics and the precision of alignment of the system components made it possible to attain a resolution of similar to 0.2 mu m when the ful l aperture of the objective was used. A single shot in the form of the second harmonic of an Nd laser, generating pulses of similar to 0.5 J energy and similar to 1.5 ns duration, was sufficient for exposure.