GAS THERMAL-CONDUCTIVITY SENSOR-BASED ON SAW

Authors
ANISIMKIN VI PENZA M OSIPENKO VA VASANELLI L
Citation
Vi. Anisimkin et al., GAS THERMAL-CONDUCTIVITY SENSOR-BASED ON SAW, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 42(6), 1995, pp. 978-980
Citations number
14
Categorie Soggetti
Engineering, Eletrical & Electronic",Acoustics
Journal title
IEEE transactions on ultrasonics, ferroelectrics, and frequency control → ACNP
ISSN journal
08853010
Volume
42
Issue
6
Year of publication
1995
Pages
978 - 980
Database
ISI
SICI code
0885-3010(1995)42:6<978:GTSOS>2.0.ZU;2-S
Abstract
An uncoated surface acoustic wave (SAW) delay line integrated with a s uitable film heater is used as a gas sensitive element based on therma l conductivity change, It detects concentrations from 0.1-100% of H-2, O-2, He, and Ar in N-2 in the temperature range from 20-150 degrees C . The value and sign of the SAW gas response are controlled by substra te material and reference gas.