Va. Didik et al., DISTRIBUTION OF ISOTOPES PRODUCED IN GALLIUM-ARSENIDE AS A RESULT OF BOMBARDMENT BY HIGH-ENERGY PROTONS, DEUTERONS, AND HE-3 NUCLEI, Semiconductors, 29(11), 1995, pp. 1085-1086
The distribution of transmutation radioactive isotopes, produced in ga
llium arsenide as a result of bombardment by 10-meV hydrogen nuclei (p
rotons and deuterons) and 20-MeV He-3 nuclei, was investigated. The is
otope concentration reaches values of 10(13)-10(14) cm(-3), and the de
pth of the profile varies from similar to 100 mu m for He-3 nuclei up
to similar to 400 mu m for protons. For this type of bombardment, the
depth of the isotope profile correlates with the threshold of the reac
tion which leads to the production of this isotope. The profiles of th
e transmutation isotopes were used to determine the energy dependence
of the cross section a for the nuclear reactions which produce these i
sotopes. The results agree with the published data. (C) 1995 American
Institute of Physics.