Ch. Ling et al., SIMULATION OF LOGARITHMIC TIME-DEPENDENCE OF HOT-CARRIER DEGRADATION IN PMOSFETS, Semiconductor science and technology, 10(12), 1995, pp. 1659-1666
The time dependence of hot carrier degradation in PMOSFETs is simulate
d on a 2D device simulator, MEDICI. The degradation is modelled by a s
patially uniform negative fixed charge, introduced at the oxide-silico
n interface. The effect on the device drain current, threshold voltage
and transconductance is studied as a function of the extent and magni
tude of the fixed charge. The extent of the fixed charge is identified
with the drain extension due to the inversion, by the fixed charge, o
f part of the channel adjacent to the drain junction. The drain extens
ion is experimentally determined from the gate-to-drain capacitance, w
hose stress time dependence therefore gives an indirect time dependenc
e for the degradation of other device parameters. Simulation results s
how a logarithmic time dependence of degradation in a number of device
parameters, confirming earlier experimental observations. Simulation
of the electron injection current reveals two peaks, the first one nea
r the drain junction and the second one near the edge of the degradati
on region. The second peak is considerably weaker and accounts for the
progressively longer time needed to create additional degradation.