A monolithically integrated displacement sensor has been fabricated in
the GaAs/AlGaAs material system The device is configured as a Michels
on interferometer and consists of a DBR laser, a directional coupler,
transparent waveguides and a photodetector. Interference fringes could
be seen at measurement distance of up to 45cm, requiring only the ali
gnment of an external GRIN lens for beam collimation.