CALIBRATION OF SCANNING ELECTRON-MICROSCOPES BY MEANS OF PITCH STRUCTURES

A method of calibrating scanning electron microscopes by means of rect angularly shaped pitch structures is proposed. By means of these types of pitch structures it is possible to determine the increase in the m icroscope image, the shift in the maximum video signal relative to the coordinates of the wall of the structure, and the diameter of the ele ctron microprobe. Information about these quantities yields a tenfold increase in the measurement precision obtained for the linear dimensio ns of submicron elements when using a scanning electron microscope.