Y. Otani et al., REMOVAL OF FINE PARTICLES FROM SMOOTH FLAT SURFACES BY CONSECUTIVE PULSE AIR-JETS, Aerosol science and technology, 23(4), 1995, pp. 665-673
In order to develop an effective dry surface cleaning method, removal
of fine particles by pulse air jets was experimentally investigated. A
dimensionless resuspension parameter, F, which is the ratio of drag
force on particles to van der Waals adhesion force, was introduced to
correlate the removal efficiency. Resuspension experiments were carrie
d out with monodisperse PSL particles and was particles with diameter
between 0.25 and 1.1 mu m on silicon wafer and glass plate. As a resul
t, it was found that deposition process of particles on the surface (g
ravitational settling and impaction at a relatively low impaction velo
city) has little effect on the removal efficiency and that consecutive
pulse air jet is effective in the removal of fine particles. Further,
F is the key parameter in determining the removal efficiency. The pr
ediction method for the removal efficiency by pulse air jets with F i
s proposed.