The investigation and fabrication of nanometer-scale structures become
s a reality due to the development of scanning tunneling microscopy an
d related techniques. Tile final goal, manipulations with tile individ
ual atoms and molecules, has been achieved. D.M. Eigler used tile scan
ning tunneling microscope (working at low temperatures ca. 4 K) to pos
ition individual xenon atoms on a single-crystal nickel surface with a
tomic precision. Mesoscopic systems composed of metallic or non-metall
ic clusters are intensively studied because of their new and interesti
ng properties, and perspectives of subsequent application in nanolitho
graphy in order to create various structures of a very high degree of
miniaturization. In this review, (i) the potential of scanning probe m
icroscopes for revealing subtle details of surfaces down to atomic res
olution is presented, (ii) a variety of different atomic manipulations
processes and other surface modifications are reviewed against the ba
ckground of different, more or less universal approaches, and finally
(iii) a few examples of cluster surface structures created and/or modi
fied by means of scanning tunneling microscope ale demonstrated.