ANGULAR SELECTIVITY OF THE INFRARED TRANSMITTANCE THROUGH OBLIQUELY SPUTTER-DEPOSITED TI-OXIDE-BASED FILMS

Titanium-oxide-based films were produced by reactive sputtering onto g lass substrates oriented with a large angle between the surface normal and the direction of the incoming deposition species. The optical pro perties were angular selective with a higher transmittance for light i ncident from the same side of the normal (positive angles) as the depo sition material than for light coming from negative angles. The select ivity was largest in the near-infrared wavelength range.