The status of microscopic X-ray fluorescence analysis with tube excita
tion and synchrotron radiation is reviewed in terms of the lateral res
olution, minimum detection limits and elemental sensitivity that can b
e achieved. As illustrations, the utilization of two typical state-of-
the-art instruments for the analysis of geological material is describ
ed; one of the instruments is based on tube excitation, the other is i
nstalled at a synchrotron X-ray source. The analytical implications of
the use of X-ray microprobes installed at a third generation storage
ring, and in particular at the European Synchrotron Radiation Facility
(ESRF), are discussed.