DEFECT-DATA MANAGEMENT-SYSTEM AT SEMATECH

Yield-enhancement systems must supply engineers with real-time yield i nformation for decision-making. In 1993, SEMATECH, in support of its m ember companies, specified a new software system for yield analysis th at is now being used to investigate yield-related problems. This artic le will review the system's architecture and automated dataprocessing routines, and will demonstrate some of its analysis capabilities, usin g actual results from a SEMATECH test process. Finally, the potential for increased productivity and yield offered by the system and planned future enhancements will be examined.