Defects play a dominant role in the determination of the electro-optic
al properties of single-crystal and polycrystalline CuInSe2. This pape
r examines the fundamental nature of point and grain boundary defects
in this Cu-ternary semiconductor and, for the first time, provides dir
ect evidence underlying the defect chemistry. Special scanning probe m
icroscopy (SPM) techniques are used for real-time atomic imaging, atom
ic processing (single-atom manipulation), and nanoscale characterizati
on of the same regions of the sample. The (220)-tri-elemental, p-rype
surfaces are examined and imaged. Cu-, In-, and Se-vacancies are creat
ed using combined, pulsed electric (SPM tip-surface), and single-wavel
ength photon fields for selected, single-atom removal. The electro-opt
ical characteristics of these defects (before and after creation) are
examined using SPM-based nano-photoluminescence and nano-cathodolumine
scence techniques that provide information in the same nanometer regim
e. Bulk photoluminescence spectra are compared and interpreted with re
spect to these data that give first time direct, atomic-level correlat
ions. In addition, the healing of these point defects by the placement
of single intrinsic atoms of the same type at the vacancy sites is ac
complished using the atomic processing techniques. The electronic defe
ct levels are verified and correlated with the atomic-scale observatio
ns. Finally, donor and acceptor defects, Cu and Se vacancies, Cu at In
sites (Cu(In)) and Se at Cu sites (Se(Cu)), are created, evaluated, a
nd characterized. The placement of the acceptor heteroimpurity oxygen
at Se vacancies is also examined. This is done both at isolated Se vac
ancies and at vacancies along electronically active grain boundaries.
The passivation of these regions (by p-type doping of the grain bounda
ry) is evaluated using nanoscale electron-beam induced-current (NEBIC)
, and newly-developed, SPM-based minority-carrier spectroscopy techniq
ues. This paper reports, for the first time, the engineering of these
defects on the atomic scale, and complements these results with the di
rect evaluation of the atomic manipulations using nanoscale electro-op
tical characterization methods.