CuInSe2 thin films have been prepared by chemical spray pyrolysis (CSP
). Effects of substrate temperature (T(s)), pH and the ion ratio (Cu/I
n) in the spray solution on the film properties have been investigated
, and the following results have been obtained; (i) films deposited wi
th neutralized solution (pH = 4.0) exhibited chalcopyrite structure in
contrast to those deposited with unneutralized one (pH = 1.9) having
sphalerite structure, (ii) resistivity increased with T(s) for films d
eposited with the unneutralized solution, while decrease of the resist
ivity was observed for the neutralized case, and (iii) remarkable incr
ease of resistivity with decreasing Cu/In has been observed. Finally,
the effect of pH on the rectifying property in the CuInSe2/CdS heteroj
unction has been presented.