CuInSe2 thin films were prepared by the ICB (ionized cluster beam) tec
hnique on glass substrates. It is found that the apparent grain size i
ncreased more than 1 mum when Cu cluster is ionized, even in In-excess
CuInSe2 films which usually shows a specular surface with a small gra
in size of less than 0.2 mum. These films were characterized by photol
uminescence (PL) spectra employing Ar and YAG lasers as excitation sou
rces. In those films with a slightly In-excess composition, the 0.85 e
V-peak was observed, which has been correlated with the good solar cel
ls performance. The PL peak gained intensity with the increase of acce
leration voltage of In-cluster up to 2 kV. It is concluded that ICB is
a promising technique for preparation of good quality CuInSe2 thin fi
lms for solar cells.