EXPERIMENTAL-DETERMINATION OF ANGULAR-ENERGY DISTRIBUTIONS OF ELECTRONS BACKSCATTERED BY BULK GOLD AND SILICON SAMPLES

Authors
GERARD P BALLADORE JL MARTINEZ JP OUABBOU A
Citation
P. Gerard et al., EXPERIMENTAL-DETERMINATION OF ANGULAR-ENERGY DISTRIBUTIONS OF ELECTRONS BACKSCATTERED BY BULK GOLD AND SILICON SAMPLES, Scanning, 17(6), 1995, pp. 377-386
Citations number
26
Categorie Soggetti
Microscopy
Journal title
Scanning → ACNP
ISSN journal
01610457
Volume
17
Issue
6
Year of publication
1995
Pages
377 - 386
Database
ISI
SICI code
0161-0457(1995)17:6<377:EOADOE>2.0.ZU;2-N
Abstract
This work describes an experimental study of the backscattering of ele ctron beams with an energy range between 20 and 100 keV. The energy di stribution of electrons backscattered by bulk gold and silicon samples at different take-off angles was determined with an original device. The different major sources of noise were studied and then the spectra obtained were processed. Theoretical interpretation of this phenomeno n using Monte Carlo simulations will be presented in a future paper.