GRAZING-INCIDENCE INTERFEROMETRY APPLIED TO THE MEASUREMENT OF CYLINDRICAL SURFACES

Citation
T. Dresel et al., GRAZING-INCIDENCE INTERFEROMETRY APPLIED TO THE MEASUREMENT OF CYLINDRICAL SURFACES, Optical engineering, 34(12), 1995, pp. 3531-3535
Citations number
8
Categorie Soggetti
Optics
Journal title
ISSN journal
00913286
Volume
34
Issue
12
Year of publication
1995
Pages
3531 - 3535
Database
ISI
SICI code
0091-3286(1995)34:12<3531:GIATTM>2.0.ZU;2-M
Abstract
Usually, rough surfaces cannot be measured by interferometric methods because the wavefronts are disturbed by speckle noise. This problem ca n be overcome by an increase of the test wavelength. One way to increa se the effective wavelength is to use grazing incidence interferometry . We suggest an interferometer specifically adapted for the measuremen t of cylinders or tubes. Reference and object wavefront are generated using problem-specific computer-generated holograms as beamsplitters. The method can be extended to other geometries. We introduce the princ iple and show first experimental results.