T. Dresel et al., GRAZING-INCIDENCE INTERFEROMETRY APPLIED TO THE MEASUREMENT OF CYLINDRICAL SURFACES, Optical engineering, 34(12), 1995, pp. 3531-3535
Usually, rough surfaces cannot be measured by interferometric methods
because the wavefronts are disturbed by speckle noise. This problem ca
n be overcome by an increase of the test wavelength. One way to increa
se the effective wavelength is to use grazing incidence interferometry
. We suggest an interferometer specifically adapted for the measuremen
t of cylinders or tubes. Reference and object wavefront are generated
using problem-specific computer-generated holograms as beamsplitters.
The method can be extended to other geometries. We introduce the princ
iple and show first experimental results.