COMMENT ON THE POSSIBILITY OF PARTIAL DECONVOLUTION OF SIMS DEPTH PROFILES IN AN ANALYTIC FORM FOR THE SIMS RESPONSE FUNCTION MEASURED FROMULTRA-THIN IMPURITY LAYERS

Authors
MAKAROV VV
Citation
Vv. Makarov, COMMENT ON THE POSSIBILITY OF PARTIAL DECONVOLUTION OF SIMS DEPTH PROFILES IN AN ANALYTIC FORM FOR THE SIMS RESPONSE FUNCTION MEASURED FROMULTRA-THIN IMPURITY LAYERS, Surface and interface analysis, 23(13), 1995, pp. 899-899
Citations number
5
Categorie Soggetti
Chemistry Physical
Journal title
Surface and interface analysis → ACNP
ISSN journal
01422421
Volume
23
Issue
13
Year of publication
1995
Pages
899 - 899
Database
ISI
SICI code
0142-2421(1995)23:13<899:COTPOP>2.0.ZU;2-9