K. Yoneda et al., THE DIELECTRIC-BREAKDOWN CHARACTERISTICS OF THIN SILICON DIOXIDE PREPARED BY TRANS-1,2-DICHLOROETHYLENE ADDED OXIDATION, Journal of the Electrochemical Society, 142(12), 1995, pp. 4304-4309
The dielectric breakdown characteristics of thin gate oxide prepared b
y trans 1,2-dichloroethylene (t-DCE:C2H2Cl2) added oxidation as a Subs
titution for 1,1,l-trichloroethane (1,1,1-TCA:CH3CCl3) have been inves
tigated. The t-DCE was shown to have lower ozone depletion potential (
ODP = 0.0001) than the 1,1,1-TCA (ODP = 0.1) and allows easy replaceme
nt of the 1,1,1-TCA. The interface characteristics were superior or co
mparable to the conventional pyrogenic oxidation. The dielectric break
down reliability was improved by addition of t-DCE. The optimum t-DCE
concentration depends on preoxidation cleaning condition. In the case
of the SCl(NH4OH:H2O2:H2O) and subsequent DHF (HF:H2O) preoxidation cl
eaning, the optimum t-DCE concentration is 5 weight percent (w/o). In
the case of the SCl preoxidation cleaning, the best dielectric charact
eristics are shown at higher t-DCE concentration; however, the recomme
nded t-DCE concentration is 5 w/o from the view point of balance of co
st and performance. The high quality and highly reliable oxide film ca
n be successfully formed by t-DCE added oxidation, which also minimize
s the ozone layer influence. The t-DCE is a primary candidate to repla
ce the 1,1,1-TCA.