MAGNETIC MICROACTUATION OF POLYSILICON FLEXURE STRUCTURES

A microactuator technology that combines magnetic thin films with poly silicon flexural structures is described, Devices are constructed in a batch-fabrication process that combines electroplating with conventio nal lithography, materials, and equipment, A microactuator consisting of a 400 x (47 - 40) x 7 mu m(3) rectangular plate of NiFe attached to a 400 x (0.9 - 1.4) x 2.25 mu m(3) polysilicon cantilever beam has be en displaced over 1.2 mm, rotated over 180 degrees, and actuated with over 0.185 nNm of torque, The microactuator is capable of motion both in and out of the wafer plane and has been operated in a conductive fl uid environment. Theoretical expressions for the displacement and torq ue are developed and compared to experimental results. [144]