DEMONSTRATION OF 3-DIMENSIONAL MICROSTRUCTURE SELF-ASSEMBLY

Abstract-Self-assembly of three-dimensional microstructures using the surface tension force of molten solder to produce out-of-plane rotatio n is demonstrated. The generic nature of the technique is illustrated by reconfiguring structures formed in both Ni metal and single crystal Si, The structures do not have a hinge to constrain the rotation. Thi s considerably simplifies fabrication and eliminates problems associat ed with the compatibility of a suitable hinge material. Details of the fabrication processes are given and results are presented for rotated structures. [139]