MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995)

Authors
CABUZ C FUKATSU K KURABAYASHI T MINAMI K ESASHI M
Citation
C. Cabuz et al., MICROPHYSICAL INVESTIGATIONS ON MECHANICAL STRUCTURES REALIZED IN P(+) SILICON (VOL 4, PG 109, 1995), Journal of microelectromechanical systems, 4(4), 1995, pp. 242-242
Citations number
1
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Journal of microelectromechanical systems → ACNP
ISSN journal
10577157
Volume
4
Issue
4
Year of publication
1995
Pages
242 - 242
Database
ISI
SICI code
1057-7157(1995)4:4<242:MIOMSR>2.0.ZU;2-X