V. Lapras et al., INTEGRATED OPTICAL-DETECTION CIRCUIT FOR MAGNETOOPTICAL DRIVES, IEEE transactions on consumer electronics, 41(4), 1995, pp. 1039-1049
An integrated optical circuit (IOC) combining all detection functions
of a standard magneto-optical reading head (M.O. reading, focus and tr
acking control) is presented. The reading function is achieved by mean
of a patented interferometric circuit (1,2). For tracking control, th
e well-known push-pull method (3,4) has been applied and adapted to in
tegrated optics. For focus control, an original method based on multim
ode interference and taking benefits of integrated optics specificity
has been successfully tested. The implemented technology is based on a
silicon substrate with a silicon nitride core between two silica clad
ding layers (Si / SiO2 / Si3N4 / SiO2) This technology is a low cost t
echnology well adapted for mass production. The optical components of
the circuits are made by standard ''hard contact'' photolithography an
d reactive ion etching. Several wafers with about 50 devices have been
processed and characterised. In particular, the detection signals hav
e been compared with the detection signals delivered simultaneously by
a standard commercial M.O. drive. This experiment demonstrates the fe
asibility of an integrated detection device for M.O. drive.