H. Sato et al., A 1.9M-PIXEL POLY-SI TFT-LCD FOR HD AND COMPUTER-DATA PROJECTORS, IEEE transactions on consumer electronics, 41(4), 1995, pp. 1181-1188
A 3.3-inch 1.9 M-pixel poly-Si TFT-LCD for high-definition and compute
r-data projectors has been developed. This LCD is able to display both
full-band HD signals and computer data. This unique applicability is
realized by adapting novel CMOS decoder circuits integrated on the sub
strate. By arranging these decoder circuits on both sides of the panel
, effective redundancy is also realized.An oxidation thinning process
and a low-resistance tungsten-polycide gate electrode are used in fabr
icating the poly-Si TFTs, and n-channel MOS-TFT mobility of 160 cm(2)/
Vs was realized. A horizontal resolution of 1000 TV lines and a contra
st ratio of 200:1 is achieved.