GROWTH OF ODPA-APB POLYIMIDE FILMS USING MOLECULAR-BEAM DEPOSITION, AND THEIR CHARACTERIZATION

We report the first growth of polyimide ODPA-APB films by the molecula r beam deposition (MBD) technique and characterize these films using X -ray photoelectron spectroscopy and Fourier transform infrared spectro scopy. MBD is a dry, ultra-high vacuum technique based on the co-depos ition of monomers from two different sources, followed by a thermally induced polycondensation reaction to form polyimide. This technique is an alternative to standard wet processing techniques involving the us e of solvents. As-deposited films consist largely of low-molecular-wei ght species. Heat-treated films are chemically indistinguishable from thermally cured, spin-coated films. Different heat treatment condition s are compared.