AN ANALYTICAL MODEL FOR MINIMUM DRIFT REGION LENGTH OF SOI RESURF DIODES
Citation
Sk. Chung et al., AN ANALYTICAL MODEL FOR MINIMUM DRIFT REGION LENGTH OF SOI RESURF DIODES, IEEE electron device letters, 17(1), 1996, pp. 22-24
Categorie Soggetti
Engineering, Eletrical & Electronic
SICI code
0741-3106(1996)17:1<22:AAMFMD>2.0.ZU;2-W
Abstract
An analytical model for calculating the minimum drift region length of
SOI RESURF diodes is presented with an expression for the maximum bre
akdown voltage of the device. The minimum drift region length is deter
mined from the condition that the maximum breakdown voltage due to the
one-dimensional field along the vertical path equals that of the late
ral electric field along the surface. Analytical results agree well wi
th the simulations using PISCES II, and qualitatively with the experim
ental results.