IN-SITU X-RAY STUDIES OF PHASE-TRANSFORMATIONS IN LEAD-ZIRCONATE-TITANATE THIN-FILMS DURING ANNEALING

Lead zirconate titanate (PZT) thin films were prepared by a sol-gel me thod on platinized Si and (100) MgO substrates. The evolution in the c rystallinity was then studied in real time during annealing with an in -situ X-ray diffraction system using a Ruud-B arrett position-sensitiv e scintillation detector. Annealing rates of 50 degrees C min(-1) and 100 degrees C min(-1) were utilized to study the growth of an intermed iate phase and the perovskite phase. This provided direct evidence on the structure evolution during heat treatment. It was observed that an intermediate phase, possibly the pyrochlore, existed over the tempera ture range 433-580 degrees C. The film transformed to the perovskite p hase as soon as the temperature reached the range 595-600 degrees C an d progressively grew as the temperature approached 650 degrees C. Thes e results suggested that it may be difficult to bypass intermediate ph ase formation at this annealing rate. However, for a 100 degrees C min (-1) heat treatment, the amount of intermediate phase was suppressed f rom the 50 degrees C min(-1) case on both platinized Si and MgO substr ates.