CATHODIC ELECTROSYNTHESIS OF PZT FILMS

Cathodic electrosynthesis of lead zirconate titanate (PZT) films on pl atinum substrates was performed via hydrolysis by electrogenerated bas e of TiCl4, ZrOCl2 and Pb(NO3)(2) salts dissolved in water in the pres ence of hydrogen peroxide. Possible cathodic reactions which underly t he base formation and the role of hydrogen peroxide in the deposition process are discussed. Deposits as-obtained were amorphous and formati on of a single perovskite phase was observed after annealing at 500 de grees C. By variation of current density and deposition time, the amou nt of the deposited material could be controlled. The films were chara cterized by XRD, TG/DTA and SEM.