NANOSTRUCTURE OF AU-20-PERCENT-PD LAYERS IN MOS2 MULTILAYER SOLID LUBRICANT FILMS

High-resolution electron microscopy imaging and electron and X-ray dif fraction techniques have been used to characterize the structure of lo w and high flux Au-20%Pd layers in Au-20%Pd/MoSx multilayer solid lubr icant thin films. Images clearly reveal different morphologies for the metal layers in the two flux regimes, which can be correlated to the variation in fracture resistance reported by an earlier indentation st udy. In the lower metal flux regime, three-dimensional islands with si ngle-crystal and multiply twinned structures are seen, while quasi-con tinuous, polycrystalline regions are seen in the higher flux case.