Graphite fluoride (CFx) is investigated as an additive for WS, thin fi
lms to reduce its sensitivity to moisture. The films are grown onto ha
rdened 440C stainless steel disks by pulsed laser deposition using the
248 nm line from an excimer laser. Substrate temperature and additive
concentration are varied to control film chemistry and crystal struct
ure. The effect of relative humidity (i.e., < 1 to 85% RH) on friction
is evaluated, Coatings grown at RT from targets with a low concentrat
ion of CFx exhibit ultralow friction (ULF) behavior in dry air (i.e.,
mu less than or equal to 0.01), but friction increases with RH. Mechan
isms for the ULF behavior are proposed which suggest that further redu
ctions in friction are possible. Films grown at 300 degrees C or with
higher concentrations of CFx are relatively insensitive to humidity, b
ut have more typical friction coefficients (mu less than or equal to 0
.04) in dry air.