The tribological properties of smooth diamond coatings sliding against
ruby were studied using a pin-on-disk tribometer. Smooth diamond film
surface was prepared by (i) deposition of thin nanocrystalline films
in the thickness range from 0.2 to 2 mu m and by (ii) post growth poli
shing. Excimer laser surface ablation, microwave plasma etching and me
chanical lapping with diamond grit were applied for post growth polish
ing. A correlation of film surface properties examined with atomic for
ce microscopy, Auger electron spectroscopy, Raman spectroscopy and sty
lus profilometry has been established with the tribological performanc
e of the tested diamond films.