OIL REMOVAL FROM METALS BY LINEAR MULTIORIFICE HOLLOW-CATHODE

A linear multi-orifice hollow cathode oxygen plasma source has been de veloped for oil removal from moving metal surfaces. The source is a li near set of plasma jets created at each orifice by a magnetically enha nced and directed d.c, hollow cathode discharge. Vacuum and electrical characteristics of the source are presented and discussed. Substantia l reduction of carbon-containing contamination on a metal surface afte r exposure to the oxygen plasma is demonstrated by using in situ XPS. The surface cleanliness of a metal sheet is evaluated by the contact a ngle with water. This angle is desired to be 10 degrees or less. The c ontact angle dependence on plasma dose density is described for plasma atmospheres of O-2 and O-2 + CF4 and two different aluminium foil thi cknesses.