DEPOSITION OF ORGANIC-INORGANIC COMPOSITE THIN-FILMS BY LI3PO4, SPUTTERING AND C2H4, PLASMA POLYMERIZATION

Organic-inorganic composite macromolecular thin films have been grown by combined r.f.-magnetron sputtering of lithium orthophosphate (Li3PO 4) and plasma polymerization of ethylene (C2H4). Of the process gases used, Ar, N-2, Ar/N-2, and Ar/O-2, only the Ar/O-2 mixture provided su itable control over the co-deposition process. The structure and elect rical properties of the smooth, pinhole-free films were investigated b y X-ray photoelectron spectroscopy, scanning electron microscopy, Four ier transform infrared spectroscopy, Rutherford backscattering spectro scopy, X-ray diffraction, and a.c.-impedance measurement. The inorgani c component of the composite films was found to exist both as a separa te phase and as a part of the polymeric backbone. The ionic conductivi ty was found to decrease with the organic content of the film.