ENERGY AND MASS-SPECTRA OF IONS IN TRIODE ION PLATING OF TI(C,N) COATINGS

Ti(C,N) coatings were deposited by triode ion plating in a mixture of argon, acetylene and nitrogen. The acetylene inlet was positioned at t wo different locations relative to the dense plasma. The energy distri bution of selected ions during Ti(CxN1-x) deposition was measured by a n energy resolved mass spectrometer. The mass spectra showed wide ener gy distributions of Ti ions, and energy distributions of other ionized molecules, clusters and radicals. A higher probability of acetylene d issociation with the acetylene inlet directed into the plasma was obse rved. Preferred orientation, lattice parameters and stress for the Ti( C,N) coatings were measured by X-ray diffraction. The measured compres sive stress ranged from 8 to 13 GPa, the microhardness from 0.24 to 0. 27 GPa. The scratch-test revealed an adhesion comparable to that of Ti N coatings.