INVESTIGATION OF SUPERLATTICE COATINGS DEPOSITED BY A COMBINED STEERED ARC EVAPORATION AND UNBALANCED MAGNETRON SPUTTERING TECHNIQUE

In this paper we report on third-generation TiAlN-ZrN superlattice thi n films deposited at industrial scale on high speed steel and stainles s steel substrates by a combined steered are evaporation and unbalance d magnetron sputtering technique. The superlattice period and hence th e mechanical and physical properties of the film were varied by modifi cation of the rotation velocity and type of rotation (one-fold and thr ee-fold). Characterization of the films was undertaken by a range of b ulk and surface analysis techniques including scanning electron micros copy, X-ray diffraction, glow discharge optical emission spectrometry, hardness and adhesion measurement. Results show that a reproducible s uperlattice structure can be fabricated without a complex atmosphere s eparation and shuttering mechanism. Control of the planetary rotation velocity and type of rotation has led to variation in the superlattice period from 19 to 132 Angstrom. Further analysis has shown that the T iAlN-ZrN superlattice system can exhibit hardness greater than 4000 HK , scratch adhesion values on high speed steel of above 50 N, [100] pre ferred orientation, average surface roughness less than 0.10 mu m and a highly dense microstructure.