PATTERNING OF YBCO FILMS BY EXCIMER-LASER ABLATION

Authors
PROYER S STANGL E SCHWAB P BAUERLE D SIMON P JORDAN C
Citation
S. Proyer et al., PATTERNING OF YBCO FILMS BY EXCIMER-LASER ABLATION, Applied physics. A, Solids and surfaces, 58(5), 1994, pp. 471-474
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics. A, Solids and surfaces → ACNP
ISSN journal
07217250
Volume
58
Issue
5
Year of publication
1994
Pages
471 - 474
Database
ISI
SICI code
0721-7250(1994)58:5<471:POYFBE>2.0.ZU;2-2
Abstract
Thin films of YBa2Cu3O7 coated with a photoresist have been patterned by means of XeCl- and KrF-excimer-laser light projection. Lines with w idths down to 3.5 mum have been fabricated without degradation in T(c) and j(c). The technique is compared with wet-chemical etching and wit h ns and fs excimer-laser patterning of films without a protective lay er.