PLASMA COPOLYMERIZATION - HEXAFLUOROPROPYLENE AND A NONPOLYMERIZABLE GAS

Plasma polymerized (PP) fluoropolymer films have been synthesized by t he plasma copolymerization of hexafluoropropylene (HFP) and a nonpolym erizable gas. Plasma etching was inhibited by fluorine scavenging and HF formation on the addition of hydrogen and was accelerated on the ad dition of oxygen. Nitrogen, oxygen, and hydrogen were incorporated int o the deposited polymer molecules when added to the HFP plasma. The po lar component of surface tension increased on nitrogen addition and th e dispersive component on hydrogen addition. The higher surface tensio n drove the deposition and coalescence of smaller particles from the g as phase polymerization yielding smooth surfaces. The significant drop in breakdown voltage on the addition of nitrogen was attributed to a different conduction mechanism in the relatively polar PP fluoropolyme r film. (C) 1996 John Wiley & Sons, Inc.