PICOMETRIC PROFILOMETRY .2. MULTI DETECTO R APPROACH AND MULTIPLEXED LOCK-IN DETECTION

Authors
GLEYZES P GUERNET F BOCCARA AC
Citation
P. Gleyzes et al., PICOMETRIC PROFILOMETRY .2. MULTI DETECTO R APPROACH AND MULTIPLEXED LOCK-IN DETECTION, Journal of optics, 26(6), 1995, pp. 251-265
Citations number
4
Categorie Soggetti
Optics
Journal title
Journal of optics → ACNP
ISSN journal
0150536X
Volume
26
Issue
6
Year of publication
1995
Pages
251 - 265
Database
ISI
SICI code
0150-536X(1995)26:6<251:PP.MDR>2.0.ZU;2-B
Abstract
In a first paper [1] we described a surface profilometer using a singl e detector and a sample scanning procedure. We have developped a multi detector version of this setup using a CCD linear array (256 pixels) a nd an original multiplexed lockin detection procedure.