PERIODIC STRUCTURATION OF POLYMER SURFACES WITH THE EXCIMER-LASER RADIATION

Authors
LAZARE S BOLLE M CROS A BELLARD L
Citation
S. Lazare et al., PERIODIC STRUCTURATION OF POLYMER SURFACES WITH THE EXCIMER-LASER RADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 105(1-4), 1995, pp. 159-163
Citations number
9
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
105
Issue
1-4
Year of publication
1995
Pages
159 - 163
Database
ISI
SICI code
0168-583X(1995)105:1-4<159:PSOPSW>2.0.ZU;2-I
Abstract
We describe the production of submicron periodic structures since the first discovery in 1992. They are produced with the ArF and KrF radiat ion of the excimer laser when the beam is linearly polarised and the f luence is set in a well defined window below the ablation threshold. T he mechanism involves a surface wave which interferes with the main be am to give a spatially modulated field on the sample surface. Besides static irradiation giving regular grating like structures, we present the results of new dynamic irradiation.